RMMT21152 Model Name: Reflexion LK - ILDWafer Size: 300Serial Number: TBDDate Available: 13/12/2024Group: ElectronicOwner: MicronCategory: Semiconductor FabricationFamily: Chemical Mechanical Polishing EquipmentType: ILD (InterLayer Dielectric) CMP System (Oxide/Poly Silicon/STI)Manufacturer: Applied MaterialsLocation: SINGAPORE