RMMT21151

  • Model Name: LITHIUS
  • Wafer Size: 300
  • Serial Number: TBD
  • Date Available: 13/12/2024
  • Group: Electronic
  • Owner: Micron
  • Category: Semiconductor Fabrication
  • Family: Resist Processing Equipment
  • Type: Cluster Tool Tracks (Resist Coater/Developer)
  • Manufacturer: TEL
  • Location: SINGAPORE