GENERAL INQUIRIES

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MANUFACTURERMODELCONFIGURATIONTOOL FAMILYTOOL TYPEWAFERTOOL ID
Applied Materials
Tool ID: RMIF17005
Manufacturer: Applied Materials
Model: Centura AP Oxide Etch eMax CT chamber
Tool Family: EtchEquipment
Configuration: Vintage 2007 - Emax CT Chamber
Wafer Size: 300
Centura AP Oxide Etch eMax CT chamber Vintage 2007 - Emax CT Chamber EtchEquipmentOxideEtchSystem300RMIF17005
Applied Materials
Tool ID: RMIF17006
Manufacturer: Applied Materials
Model: Centura AP Oxide Etch eMax CT plus chamber
Tool Family: EtchEquipment
Configuration: emax CT plus chamber
Wafer Size: 300
Centura AP Oxide Etch eMax CT plus chamber emax CT plus chamber EtchEquipmentOxideEtchSystem300RMIF17006
Applied Materials
Tool ID: RMIF17007
Manufacturer: Applied Materials
Model: Centura AP Oxide Etch eMax CT3 chamber
Tool Family: EtchEquipment
Configuration: Emax Ct3 Chamber
Wafer Size: 300
Centura AP Oxide Etch eMax CT3 chamber Emax Ct3 Chamber EtchEquipmentOxideEtchSystem300RMIF17007
Applied Materials
Tool ID: TLAD11655
Manufacturer: Applied Materials
Model: Centura Multi-Process CVD
Serial Number: C037
Tool Family: DepositionEquipment
Configuration: 2xDLH Chambers
Wafer Size: 200
Centura Multi-Process CVD 2xDLH Chambers DepositionEquipmentMulti_ProcessCVD200TLAD11655
Applied Materials
Tool ID: TLAD12123
Manufacturer: Applied Materials
Model: Centura Ultima
Serial Number: 302922
Tool Family: DepositionEquipment
Configuration: 2xUltima HDP Chambers
Wafer Size: 200
Centura Ultima 2xUltima HDP Chambers DepositionEquipmentHDP_CVD_ChemicalVaporDeposition200TLAD12123
Applied Materials
Tool ID: TLAD12126
Manufacturer: Applied Materials
Model: Centura Ultima Plus
Serial Number: 402910
Tool Family: DepositionEquipment
Configuration: 3 chamber Ultima+ with ETO generators
Wafer Size: 200
Centura Ultima Plus 3 chamber Ultima+ with ETO generators DepositionEquipmentHDP_CVD_ChemicalVaporDeposition200TLAD12126
Applied Materials
Tool ID: RMIF17009
Manufacturer: Applied Materials
Model: Compass
Serial Number: T637
Tool Family: MetrologyEquipment
Configuration: Compass 200
Wafer Size: 200
Compass Compass 200 MetrologyEquipmentWafer Inspection Equipment200RMIF17009
Applied Materials
Tool ID: RMIF17011
Manufacturer: Applied Materials
Model: Compass Pro
Serial Number: T-865
Tool Family: MetrologyEquipment
Configuration: Compass Pro 300
Wafer Size: 300
Compass Pro Compass Pro 300 MetrologyEquipmentWafer Inspection Equipment300RMIF17011
Applied Materials
Tool ID: RMIF17010
Manufacturer: Applied Materials
Model: Compass Pro
Serial Number: T-827
Tool Family: MetrologyEquipment
Configuration: Compass Pro 300
Wafer Size: 300
Compass Pro Compass Pro 300 MetrologyEquipmentWafer Inspection Equipment300RMIF17010
Applied Materials
Tool ID: RMIF17012
Manufacturer: Applied Materials
Model: Compass Pro
Serial Number: T-841
Tool Family: MetrologyEquipment
Configuration: Compass Pro 300
Wafer Size: 300
Compass Pro Compass Pro 300 MetrologyEquipmentWafer Inspection Equipment300RMIF17012
Applied Materials
Tool ID: RMTI12012
Manufacturer: Applied Materials
Model: ComPlus - 2T
Serial Number: T2033
Tool Family: MetrologyEquipment
Wafer Size: 300
ComPlus - 2T MetrologyEquipmentWafer Inspection Equipment300RMTI12012
Applied Materials
Tool ID: RMTI12013
Manufacturer: Applied Materials
Model: ComPlus - 2T
Serial Number: T199
Tool Family: MetrologyEquipment
Wafer Size: 300
ComPlus - 2T MetrologyEquipmentWafer Inspection Equipment300RMTI12013
Applied Materials
Tool ID: RMHC12004
Manufacturer: Applied Materials
Model: Mirra - ILD
Serial Number: L-121
Tool Family: ChemicalMechanicalPolishingEquipment
Wafer Size: 200
Mirra - ILD ChemicalMechanicalPolishingEquipmentILD_InterLayerDielectric_CMP_System_OxideOrPolySiliconOrSTI200RMHC12004
Applied Materials
Tool ID: RMHC15002
Manufacturer: Applied Materials
Model: Mirra DNS - ILD
Serial Number: 405409
Tool Family: ChemicalMechanicalPolishingEquipment
Wafer Size: 200
Mirra DNS - ILD ChemicalMechanicalPolishingEquipmentILD_InterLayerDielectric_CMP_System_OxideOrPolySiliconOrSTI200RMHC15002
Applied Materials
Tool ID: RMHC12005
Manufacturer: Applied Materials
Model: Mirra DNS - Tungsten
Serial Number: 307317
Tool Family: ChemicalMechanicalPolishingEquipment
Configuration: Mirra 3400 Tungsten Polisher with DNS AS-2000 Scrubber
Wafer Size: 200
Mirra DNS - Tungsten Mirra 3400 Tungsten Polisher with DNS AS-2000 S... ChemicalMechanicalPolishingEquipmentMetalLayerCMPSystem_Tungsten200RMHC12005
Applied Materials
Tool ID: TLLC10059
Manufacturer: Applied Materials
Model: NanoSEM
Serial Number: U578
Tool Family: MetrologyEquipment
Wafer Size: 200
NanoSEM MetrologyEquipmentCD_SEM200TLLC10059
Applied Materials
Tool ID: TLLC10060
Manufacturer: Applied Materials
Model: NanoSEM
Serial Number: U570
Tool Family: MetrologyEquipment
Wafer Size: 200
NanoSEM MetrologyEquipmentCD_SEM200TLLC10060
Applied Materials
Tool ID: TLAD12112
Manufacturer: Applied Materials
Model: NanoSEM 3D
Serial Number: U579
Tool Family: MetrologyEquipment
Wafer Size: 200
NanoSEM 3D MetrologyEquipmentCD_SEM200TLAD12112
Applied Materials
Tool ID: TLAD12032
Manufacturer: Applied Materials
Model: P5000 Multi-Process CVD
Serial Number: 4582
Tool Family: DepositionEquipment
Configuration: 2xCVD Chambers
Wafer Size: 200
P5000 Multi-Process CVD 2xCVD Chambers DepositionEquipmentMulti_ProcessCVD200TLAD12032
Applied Materials
Tool ID: TLAD12031
Manufacturer: Applied Materials
Model: P5000 Multi-Process CVD
Serial Number: 3047
Tool Family: DepositionEquipment
Configuration: 2xCVD Chambers
Wafer Size: 200
P5000 Multi-Process CVD 2xCVD Chambers DepositionEquipmentMulti_ProcessCVD200TLAD12031
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