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PROCESS	MANUFACTURER	TYPE	WAFER
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VIEW	MANUFACTURER	MODEL	CONFIGURATION	PROCESS	WAFER	TOOL ID
	LAM	2300 Versys Exelan	3xExelan Chambers	ETCH - OXIDE	200	RO40
	LAM	2300 Versys Exelan Flex	3xExelan Flex Chambers	ETCH - OXIDE	200	RF05
	LAM	2300 Versys Exelan Flex	3xExelan Flex Chambers	ETCH - OXIDE	200	RF06
	LAM	2300 Versys Exelan Flex	3xExelan Flex Chambers	ETCH - OXIDE	200	RF07
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D156721
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D156722
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D214147
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D214145
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D214146
	LAM	Alliance A6 4428-XL	3x4428XL Chambers	ETCH - POLY	200	LAM-A644-SB
	LAM	Alliance A6 4528-XL	3x4528XL Chambers	ETCH - OXIDE	200	M7ELX701
	LAM	Alliance A6 9400-DFM	3x9400-DFM Chambers	ETCH - POLY	200	M7ELDD01
	LAM	Alliance A6 9600-DFM	2x9600-DFM Chambers, 2xASP Chambers	ETCH - METAL	200	M4EMT090
	LAM	Alliance A6 9600-DFM	2x9600-DFM Chambers, 2xASP Chambers	ETCH - METAL	200	M4EMT210
	LAM	Alliance A6 Exelan-HP	3xExelan HP Chambers	ETCH - OXIDE	200	LAM-EXELAN-MIA1
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49C-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49E-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49F-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49G-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49H-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49I-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49J-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49L-ATA2
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-12
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-42
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-5
	LAM	Drytek ASIQ	---	ETCH - METAL	150	ASIQ-20
	LAM	Drytek ASIQ	---	ETCH - METAL	150	ASIQ-21
	LAM	Ontrak DSS-200 Series 1	---	WET - SCRUBBER	200	ONT-DSS3-PFA2
	LAM	Ontrak DSS-200 Series 1	---	WET - SCRUBBER	200	ONT-DSS4-PFA2
	LAM	Ontrak DSS-200 Series 2	---	WET - SCRUBBER	200	WSW006
	LAM	Ontrak DSS-200 Series 2	---	WET - SCRUBBER	200	WSW113
	LAM	Ontrak DSS-200 Series 2	---	WET - SCRUBBER	200	WSW12
	LAM	Ontrak DSS-200 Series 2	---	WET - SCRUBBER	200	WSW23
	LAM	Rainbow 4400	---	ETCH - POLY	200	LAM-4400A-ISX
	LAM	Rainbow 4400	---	ETCH - POLY	200	LAM-4400B-ISX
	LAM	Rainbow 4400	---	ETCH - POLY	200	LAM-4400C-ISX
	LAM	Rainbow 4420	PARTS MISSING	ETCH - POLY	150	LAM-44C-ATA2
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC34
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC193
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC73
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC216
	LAM	Rainbow 4420	DATA ERROR	ETCH - POLY	200	LRC 74
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC26-1
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC17
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC06
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC114
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC116
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC23
	LAM	Rainbow 4420	---	ETCH - POLY	200	LRC164

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