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PROCESS	MANUFACTURER	TYPE	WAFER
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VIEW	MANUFACTURER	MODEL	CONFIGURATION	PROCESS	WAFER	TOOL ID
	APPLIED MATERIALS	Centura DLH	2xDLH Chambers	CVD - SiN	200	CS24
	APPLIED MATERIALS	Centura DPS R0 Metal	2xDPS R0 Metal Chambers, 2xASP Chambers	ETCH - METAL	200	RA25
	APPLIED MATERIALS	Centura DPS R0 Metal	2xDPS R0 Metal Chambers, 2xASP Chambers	ETCH - METAL	200	RA26
	APPLIED MATERIALS	Centura DPS R1 Metal	2xDPS R1 Metal Chambers, 2xASP+ Chambers	ETCH - METAL	200	RA01
	APPLIED MATERIALS	Centura DPS R1 Metal	2xDPS R1 Metal Chambers, 2xASP+ Chambers	ETCH - METAL	200	RA57
	APPLIED MATERIALS	Centura DPS R1 Metal	2xDPS R1 Metal Chambers, 2xASP+ Chambers	ETCH - METAL	200	RA60
	APPLIED MATERIALS	Centura DPS R1 Metal	2xDPS R1 Metal Chambers, 2xASP+ Chambers	ETCH - METAL	200	RA02
	APPLIED MATERIALS	Centura DPS R1 Metal	2xDPS R1 Metal Chambers, 2xASP+ Chambers	ETCH - METAL	200	RA75
	APPLIED MATERIALS	Centura DPS R1 POLY	2xDPS R1 Poly Chambers	ETCH - POLY	200	RP57
	APPLIED MATERIALS	Centura DPS R1 POLY	3xDPS R1 Poly Chambers	ETCH - POLY	200	RP04
	APPLIED MATERIALS	Centura DPS+ Poly	2xDPS+ Poly Chambers	ETCH - POLY	200	RP55
	APPLIED MATERIALS	Centura DPS+ Poly	2xDPS+ Poly Chambers	ETCH - POLY	200	RP58
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M7EAD302
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M7EAD303
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M7EAD504
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M7EAD507
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M9EAP405
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M7EAD508
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M7EAD510
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M7EAD511
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M9EAP101
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M9EAP402
	APPLIED MATERIALS	Centura DPS+ Poly	3xDPS+ Poly Chambers	ETCH - POLY	200	M9EAP404
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - TEOS	200	CT79
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - SiN	200	CTZZZ
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - SiN	200	CS78
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - TEOS	200	CT22
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - TEOS	200	CT23
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - SiN	200	CS71
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - TEOS	200	CT78
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - SiN	200	CS53
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - SiN	200	CS52
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - TEOS	200	CT26
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - NITRIDE	200	CT76
	APPLIED MATERIALS	Centura DxZ	3xDxZ Chambers	CVD - SiN	200	CT77
	APPLIED MATERIALS	Centura DxZ	2xDxZ Chambers	CVD - SiN	200	CS51
	APPLIED MATERIALS	Centura eMax	4xEMax Chambers, SMIF	ETCH - OXIDE	200	CENTF55
	APPLIED MATERIALS	Centura eMax	4xEMax Chambers, SMIF	ETCH - OXIDE	200	CENTF56
	APPLIED MATERIALS	Centura eMax	4xEMax Chambers, SMIF	ETCH - OXIDE	200	CENTF58
	APPLIED MATERIALS	Centura eMax	3xEMax Chambers	ETCH - OXIDE	200	M7EAE501
	APPLIED MATERIALS	Centura eMax	3xEMax Chambers	ETCH - OXIDE	200	M7EAE502
	APPLIED MATERIALS	Centura eMax	3xEMax Chambers	ETCH - OXIDE	200	M7EAE703
	APPLIED MATERIALS	Centura eMxP+	3xeMxP+ Chambers	ETCH - OXIDE	200	D214177
	APPLIED MATERIALS	Centura eMxP+	3xeMxP+ Chambers	ETCH - OXIDE	200	D214175
	APPLIED MATERIALS	Centura MxP Poly	3xMxP Poly Chambers	ETCH - POLY	200	D214174
	APPLIED MATERIALS	Centura MxP+ Oxide	3xMxP+ Oxide Chambers	ETCH - OXIDE	200	RM72
	APPLIED MATERIALS	Centura MxP+ Oxide	3xMxP+ Oxide Chambers	ETCH - OXIDE	200	RM51
	APPLIED MATERIALS	Centura PVD	1xSB Al PVD Chamber, 1xWB TTN PVD Chamber	PVD	200	MA64
	APPLIED MATERIALS	Centura PVD	2xPVD Chambers	PVD	200	MA76
	APPLIED MATERIALS	Centura Radiance	2xRadiancePlus Chambers, 1xXe+ Chamber, 1xDPN Chamber	RTP	200	RTA03

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